Parametric design support device and parametric design support method

摘要

The parameter design support device 2 includes a storage unit 24 and a control unit 25. The storage unit 24 stores a recipe for controlling the substrate processing apparatus 1. The control unit 25 acquires at least one level value of each of the plurality of control factors. The level value indicates a condition when the substrate processing apparatus 1 processes the substrate 11. The control part 25 produces | generates the combination information which shows the combination of the acquired level value by a statistical method. The control unit 25 creates an evaluation recipe for each combination of level values based on the recipe stored in the storage unit 24 and the combination information. When the evaluation recipe includes a parameter corresponding to the control factor, the control unit 25 sets the level value of the corresponding control factor as the parameter value of the parameter.