Microlenses Array For Beam Shaping And Homogenization

摘要

The present invention relates to a micro-lens array for beam shaping and homogenization. The micro-lens array comprises: an optical substrate; and multiple micro-lenses distributed on one side of the optical substrate in arbitrary order. The multiple micro-lenses are formed as a rectangle in which the length of a bottom side is 20-70 μm and comprise multiple single lens cells having the shape of a spherical surface satisfying a sag profile of the following equation (1). The micro-lens array is divided by multiple unit blocks having the shape of the rectangle in which the length of the side is 190-280 μm, wherein the multiple sides are combined in the single lens cell. The micro-lens array is a rectangular template in which the multiple unit blocks are combined. In the equation (1), z=cr^2/1+√1-(1+k)c^2r^2z: z is the height on the x, y position of the single lens (sag value); c is the axial curvature of the single lens (x-curvature, y-curvature); k is the conic constant of the single lens: r^2=x_1·x^2+y_1·y^2 x_1; and x_1 and y_1 are weighted values of the direction of X-axis and Y-axis.