Voltage application device and output voltage waveform formation method

摘要

In a tester for inspecting electrical characteristics of a plurality of devices under test formed on a substrate, a voltage applying device for applying a voltage to the devices under test has a plurality of transient steps suitable for it when a predetermined setting condition is given. To form a step-type transient voltage waveform, the number of transient steps, step time, and step voltage are set as the transient voltage setting parameters, and based on these, an output voltage having a step-type transient voltage waveform is formed. The response when the output voltage is stepped into the DUT is a second-order or higher-order retarder in which overshoot occurs, and the end point of the step time of each transient step exceeds the end point of the rising time in the step response curve of the second-order retarder. It is set to be the time between the hours.