首页> 外国专利> Rotation of the distribution pump array allowing simultaneous distribution on multiple electronic substrates by multiple distribution pumps

Rotation of the distribution pump array allowing simultaneous distribution on multiple electronic substrates by multiple distribution pumps

机译:分配泵阵列的旋转允许通过多个分配泵在多个电子基板上同时分配

摘要

The method of dispensing a material includes delivering an electronic substrate to a dispensing location. The electronic substrate has at least two identical patterns and at least two fiducial marks. The method captures at least one image of at least two reference marks provided on the electronic substrate, analyzes the at least one image to determine the position of the electronic substrate in the X-axis, Y-axis, and θ directions, and the electronic substrate The method further includes calculating the rotation angle of and rotating the distribution pump array to match the angle of the electronic substrate. Alternatively, the electronic substrate can be rotated to match the angle of the distribution pump array.
机译:分配材料的方法包括将电子基板输送到分配位置。电子基板具有至少两个相同的图案和至少两个基准标记。该方法捕获设置在电子基板上的至少两个参考标记的至少一幅图像,分析至少一幅图像以确定电子基板在X轴,Y轴和θ方向上的位置,以及所述方法还包括计算所述分配泵阵列的旋转角并使所述分配泵阵列旋转以匹配所述电子衬底的角度。或者,可以旋转电子基板以匹配分配泵阵列的角度。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号