Exhaust gas measuring system and apparatus based on monitoring of operating state about processing of exhaust gas

摘要

Disclosed are a system and an apparatus for measuring an exhaust gas based on detection of an operating state. The system for measuring the exhaust gas includes: an exhaust gas treatment device for purifying the exhaust gas generated in a semiconductor manufacturing process; and an exhaust gas detection device for detecting an operating state of the exhaust gas treatment device, and detecting a treatment state of the exhaust gas treatment device based on the detected operating state. Accordingly, a state of the exhaust gas treatment device installed for purifying the exhaust gas in the semiconductor manufacturing process is detected to allow auxiliary facilities to be operated according to the treatment state of the exhaust gas treatment device so that the system for measuring the exhaust is operated more economically through efficient operations of the auxiliary facilities.