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Stage mechanism

机译:阶段机制

摘要

Provided is a small stage mechanism with little backlash, little flow in the direction along the axis of the feed screw, and a small size. The stage mechanism 10 includes a transfer screw 11, a fixed stage 13 having a space portion 13a incorporating the transfer screw, a movable stage 15, and a backlash absorbing portion 17, The transfer screw has a first end 11d and a second end 11e, and the stage mechanism further includes a shift prevention portion 19 that prevents the transfer screw from shifting in the direction toward the first end side, and the transfer screw It is provided with a pressing force adjusting section 21 for adjusting the pressing force for pressing in the direction of the first end from the second end side, the shift prevention portion is in contact with the wall 13b of the space portion at the first end side, and the pressing force adjusting portion is The second end is pressed in line contact.
机译:提供了一种小级机构,其具有较小的反冲,沿进给螺杆的轴线方向的流动少,尺寸小。台架机构10包括:传递螺杆11;固定台13,其具有结合有传递螺杆的空间部分13a;可动台15;以及游隙吸收部分17,该传递螺杆具有第一端11d和第二端11e,载物台机构还包括:防移位部19,其防止传递螺杆向着第一端侧的方向移位;以及传递机构,其具有推压力调节部21,该推压力调节部21用于调节向推压部件的推压力。从第二端侧朝向第一端的方向,防移位部在第一端侧与空间部的壁13b接触,并且压力调节部为第二端。

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