Q SAW SAW resonator to enhance Q-factor and manufacturing method thereof

摘要

A SAW resonator and process method for improving the Q value are provided. The SAW resonator according to an embodiment of the present invention includes IDTs and voids formed at both ends of the IDT. Accordingly, instead of using the Bragg reflector of the conventional SAW resonator, an air gap is formed at the SAW reflection point to satisfy the ideal reflection condition, so that a higher Q value can be obtained than the conventional SAW resonator.