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Apparatus of forming liquid-mediated material pattern method of manufacturing the same method of forming liquid-mediated pattern using the same and liquid-mediated pattern
Apparatus of forming liquid-mediated material pattern method of manufacturing the same method of forming liquid-mediated pattern using the same and liquid-mediated pattern
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机译:形成液体介电材料图案的设备制造方法与使用相同和液体介导的图案形成液体介导的图案的方法相同
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摘要
The present invention is applicable to a variety of materials, and provides a liquid mediating pattern forming apparatus having high productivity and economy. Liquid mediating pattern forming apparatus according to an embodiment of the present invention, the liquid receiving portion for receiving the liquid to be evaporated; And a pattern forming unit disposed on the liquid receiving unit and the evaporation target liquid is evaporated to form a liquid mediating pattern. The liquid mediating pattern forming apparatus comprising: a liquid receiving unit, the depression receiving the evaporation target liquid An outer wall member enclosed to have an area; And a plurality of pillar members disposed in the depression region. The pattern forming unit includes a plurality of through holes disposed between the pillar members.
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