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Apparatus of forming liquid-mediated material pattern method of manufacturing the same method of forming liquid-mediated pattern using the same and liquid-mediated pattern

机译:形成液体介电材料图案的设备制造方法与使用相同和液体介导的图案形成液体介导的图案的方法相同

摘要

The present invention is applicable to a variety of materials, and provides a liquid mediating pattern forming apparatus having high productivity and economy. Liquid mediating pattern forming apparatus according to an embodiment of the present invention, the liquid receiving portion for receiving the liquid to be evaporated; And a pattern forming unit disposed on the liquid receiving unit and the evaporation target liquid is evaporated to form a liquid mediating pattern. The liquid mediating pattern forming apparatus comprising: a liquid receiving unit, the depression receiving the evaporation target liquid An outer wall member enclosed to have an area; And a plurality of pillar members disposed in the depression region. The pattern forming unit includes a plurality of through holes disposed between the pillar members.
机译:本发明适用于多种材料,并且提供了具有高生产率和经济性的液体介导图案形成设备。根据本发明实施例的液体中介图案形成设备,液体接收部分用于接收要蒸发的液体;并且,布置在液体接收单元上的图案形成单元和蒸发目标液体被蒸发以形成液体中介图案。液体中介图案形成设备包括:液体接收单元,凹陷接收蒸发目标液体。多个支柱构件设置在凹陷区域中。图案形成单元包括布置在柱构件之间的多个通孔。

著录项

  • 公开/公告号KR20200093292A

    专利类型

  • 公开/公告日2020-08-05

    原文格式PDF

  • 申请/专利权人 울산과학기술원;

    申请/专利号KR20190010576

  • 发明设计人 김태성;배주열;

    申请日2019-01-28

  • 分类号H01L21/67;H01L21/027;H01L21/311;H01L21/3213;

  • 国家 KR

  • 入库时间 2022-08-21 11:06:19

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