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BREAKING APPARATUS and BREAKING METHOD for BRITTLE MATERIAL SUBSTRATE
BREAKING APPARATUS and BREAKING METHOD for BRITTLE MATERIAL SUBSTRATE
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机译:脆性材料基质的破裂装置和破裂方法
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摘要
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摘要
[Problem] To provide a brake device capable of obtaining a high-quality product by suppressing the occurrence of flaws on the surface of a substrate during division. [Solution means] A pair of left and right receiving blades (1, 2) formed with corners (1a, 1b) on the short side of the substrate mounting surface, and a pressing blade (3), and the receiving blades are spaced apart from each other. They are arranged so that they are parallel, and the pressing blade is arranged so that it can be pushed between the receiving blades, and the brittle material substrate (W) to be divided is made so that the scribe line (S) formed on the surface thereof is parallel to the edge. As a brake device to be mounted, the edge of the blade is configured to be chamfered with a fine R of 0.05 to 0.2 mm.
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