2 1 Using Images from Secondary Microscope Detectors to Automatically Generate Labeled Images from Primary Microscope Detectors

摘要

Methods and systems for generating labeled images from a microscope detector by utilizing detector data from different microscope detectors of a different modality include applying a focused charged beam to a sample, focused charge incident on the sample using a first microscope detector. Detecting the emission generated from the beam, and then automatically generating a first labeled image using the detector data from the first microscope detector. Automatically generating the first labeled image includes determining configuration information for portions of the sample based on the detector data, and then automatically labeling regions of the first image associated with portions of the sample with corresponding configuration information. Include. A second image of the sample is generated using detector data from a second microscope detector system of a different form, and then the first labeled image is used to automatically label regions of the second image with corresponding configuration information.