PANEL BREAKING DEVICE OF BRITTLE MATERIAL SUBSTRATE AND PANEL BREAKING METHOD USING THE SAME

摘要

The present invention provides a brittle material capable of preventing surface defects or complete cleavage of the brittle material substrate by conveying the brittle material substrate by using a fixed table and a moving table capable of adsorption and air-floating before performing the step of separating the brittle material substrate. An object of the present invention is to provide a dividing apparatus and a dividing method for a substrate. In order to achieve the above object, the apparatus for dividing a brittle material substrate according to the present invention includes a plurality of fixed tables 110 and an upper member having a movable table 120 positioned between the fixed tables 110 and movable. 100, a lower member 300 having a support plate 310, a lifting part 320 coupled to the support plate 310, and a longitudinal direction moving in the longitudinal direction over the support plate 310. An intermediate member 200 having a moving part 230 is included.