FIB-SEM METHOD FOR OPERATING A PLURALITY OF FIB-SEM SYSTEMS

摘要

Processes may be performed through multiple FIB-SEM systems. The first process group includes recording an image through an electron beam column, depositing material with the supply of process gas, and performing ion beam etching. The second process group includes performing a sample exchange, exchanging a reservoir of a gas source for the process gas, and verifying the recorded image through the electron beam column. The second group of processes is prioritized. The FIB-SEM system is operated to work on the processes included in the process inventory. In a plurality of FIB-SEM systems, if a second group of processes should be performed simultaneously, an instruction based on prioritization is output to the user.