HIGH FREQUENCY WAVE ACCELERATION TYPE ION ACCELERATIONTRANSPORT DEVICE WITH HIGH ENERGY ACCURACY

摘要

Provides a technique for high precision energy analysis of beams with energy widths. High-frequency-accelerated ion acceleration / transporter with high energy accuracy is a beamline after acceleration of an ion beam by a high-frequency acceleration system having an energy width (energy distribution) with respect to a set beam energy. And a transverse beam converging element. The ion acceleration / transport device is also equipped with a double slit composed of an energy limiting slit and an energy analysis slit at a position where energy dispersion and beam size are appropriated by a deflection electromagnet for energy analysis and a transverse beam converging element. The double slit reduces the energy width of the ion beam and realizes the required energy accuracy by adjusting the energy to be smaller, while performing energy separation and energy limitation and suppressing a decrease in the beam current amount.