One chip image sensor manufacturing method for simultaneously sensing visible ray and near infrared ray

摘要

The present invention relates to a single-chip image sensor capable of simultaneously detecting visible light and near-infrared light, which simultaneously detects visible light and near-infrared light in one image sensor, so that the surrounding object can be recognized with high sensitivity even during the day and at night. will be. A single chip image sensor capable of simultaneously detecting visible light and near infrared light according to the present invention includes a visible light receiver 112 and a NIR light receiver 113 on a silicon (Si) substrate 100 in a CMOS image sensor (CIS). A light receiving unit 110 and a logic and signal processing unit are formed, and an IR cut filter 130 and a visible-ray cut filter 135 are disposed side by side on the silicon substrate 100. The color filter 140 is disposed on the infrared cut filter 130 and the visible light cut filter 135, and the planarization layer 150 is formed on the color filter 140. Since the microlens array 170 is disposed on the upper portion of the 150, the image sensor and the near-infrared image sensor may be integrated on a single chip, thereby reducing manufacturing costs and configuring a compact device.