ELECTRON MICROSCOPE BASED ON HEAT TRANSFER MODEL PREDICTION TECHNIQUE AND CONTROL METHOD THEREOF

摘要

An electron microscope according to one embodiment may include: an electronic lens block; a cooling unit installed at the electronic lens block, and having a conduit through which a refrigerant flows and a cooler cooling the refrigerant; a temperature sensor which measures the temperature of the electronic lens block; and a control unit which derives a first heat exchange transfer function based on a time delay characteristic between a current applied to the electronic lens block and the temperature measured at the temperature sensor, and adjusting a cooling amount of the cooling unit based on the current applied to the electronic lens block and the first heat exchange transfer function.;COPYRIGHT KIPO 2020