首页> 外国专利> AIR FILTER FOR EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR AND DISPLAY PANEL, AND AIR FILTER MANUFACTURING APPARATUS FOR MANUFACTURING AIR FILTER FOR EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR AND DISPLAY PANEL

AIR FILTER FOR EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR AND DISPLAY PANEL, AND AIR FILTER MANUFACTURING APPARATUS FOR MANUFACTURING AIR FILTER FOR EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR AND DISPLAY PANEL

机译:用于制造半导体和显示面板的设备的空气滤清器以及用于制造半导体和显示面板的设备的空气滤清器制造装置

摘要

A disclosed air filter for equipment for manufacturing a semiconductor and a display panel includes a filter frame member and a filter member, wherein the filter member is manufactured in a manner that a plurality of filter raw materials in a panel shape are stacked to be cut in a predetermined shape in a state of being compressed while being pressurized at predetermined pressure, thereby universally corresponding to various required shapes of filters. In addition, contamination such as arbitrary separation of particles can be prevented.;COPYRIGHT KIPO 2020
机译:公开的用于制造半导体的设备和显示面板的空气过滤器包括过滤器框架构件和过滤器构件,其中过滤器构件以堆叠成板状的多种过滤器原材料被切成薄片的方式制造。在以预定压力加压的同时处于压缩状态的预定形状,从而普遍对应于各种所需形状的过滤器。此外,还可以防止诸如微粒的任意分离之类的污染。; COPYRIGHT KIPO 2020

著录项

  • 公开/公告号KR102109158B1

    专利类型

  • 公开/公告日2020-05-11

    原文格式PDF

  • 申请/专利权人 JEON HONG KEU;

    申请/专利号KR20200032434

  • 发明设计人 JEON HONG KEUKR;

    申请日2020-03-17

  • 分类号H01L21/67;B01D39/20;

  • 国家 KR

  • 入库时间 2022-08-21 11:04:46

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