- METHOD TO DEFINE CIRCULAR SHAPE OFF-AXIS ASPHERIC MIRRORS

摘要

Method for determining circular aspheric-aspherical mirror according to the present invention In a method for determining circular aspherical-aspherical mirror, (a) the main control unit 100 is centered at a predetermined distance away from the reference optical axis (ROA) of the aspherical surface Defining an opening of an OAM (Off-Axis aspheric Mirror) on the xyz coordinate system where the original opening is projected onto the aspherical surface; (b) the main control unit 100 defining a coordinate transformation matrix that converts the xyz coordinate system to an xuv coordinate system; (c) the coordinate transformation module 200 defining the opening of the OAM that is a curved surface in the xyz coordinate system as the coordinate transformation matrix as a plane through coordinate transformation to an xuv coordinate system; (d) the main control unit 100 calculating the maximum depth of the OAM in the xuv coordinate system; And (e) determining, by the main control unit 100, the OAM by the distance to the point of the maximum depth or the center of the actual elliptical opening; which includes a specific aspheric coefficient of'-1'. It has the effect of defining a more comprehensive and generic stock-aspheric mirror.