Method and apparatus for reducing the influence of nonlinear behavior

摘要

The present invention comprises the steps of obtaining information about a patterning error in a patterning process comprising a patterning device; Correcting the patterning error by a correction device according to the patterning error information to determine nonlinearity over an introduced time period; And determining, by a computer system, a patterning error offset for use with a correction device based on the determined nonlinearity.