Cluster ion beam generation method and cluster ion beam irradiation method using the same

摘要

It provides a cluster ion beam generation method capable of increasing the beam current value of the cluster ion beam than the conventional one. The cluster ion beam generation method of the present invention is a cluster ion beam generation method in which a cluster ion beam having carbon and hydrogen as constituent elements is generated from a hydrocarbon-based compound raw material, and the hydrocarbon-based compound raw material comprises a side chain. And a branched chain saturated hydrocarbon, wherein the branched chain saturated hydrocarbon is branched only by tertiary carbon atoms.