Method for microstructuring a substrate comprising a front and rear side and consisting of a first material, the surface of which can be assigned to the rear side directly adjoins a layer made of a second material, the first and second material having different optical transmission properties with respect to a laser wavelength of a laser beam emitted by a laser system in such a way that when the laser beam passes through the substrate from the front to the back, no material-degrading absorption effects occur within the substrate and the laser beam is at least partially absorbed within the second material, so that the second material interacts with the laser beam occurs and as a result the substrate is structured directly adjacent to the area of the second material interacting with the laser beam by local material removal, characterized in that eites material a liquid in the form of water is used, which wets the back of the substrate at least in regions, and that the laser system is operated to generate a pulsed laser beam with a wavelength between 1.5 microns and 3 microns and with individual pulse durations in the range between 100 fs and 200 ps and with single pulse energies in the range between 100 nJ and 200 µJ.
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