Coaxial optical system of a friction-free scanning system for light detection and distance measurement, LIDAR, measurements

摘要

A scanning system (100) includes a deflecting mirror (150) having a reflective surface (151) and an elastic suspension (902) of the deflecting mirror (150). An actuator (901) is arranged to actuate by elastic deformation of the elastic suspension (902) resonant motion of a mass filter system formed by the deflection mirror (150) and the elastic suspension (902). A laser (101) is arranged to emit primary light (111) along a transmission beam (121). A detector (102) is arranged to detect secondary light (112) along a receive beam (122), the transmit beam (131) and receive beam (122) being along an overlap portion (125) of the transmit beam (121) and the receive beam (122 ), wherein the overlap portion (125) comprises the reflective surface (151) of the deflecting mirror (150). A coaxial optical system can thereby be implemented. LIDAR applications are possible.