ADAPTIVE-OPTICAL DEVICE, OPTICAL SYSTEM AND OPTICAL WAVE FRONT COMPENSATION METHOD

摘要

An adaptive-optical device includes a first deformable mirror (4) which has a reflective surface (21) reflecting light that has propagated through an atmosphere, and a drive unit (22) which has a plurality of drive elements (23) and one uneven shape of the reflective surface includes a second deformable mirror (5) having a reflective surface (26) reflecting light from the first deformable mirror, and a drive unit (27) having a plurality of drive elements (28) and one uneven shape of the reflecting surface includes, a beam path dividing unit (13), which divides the light from the second deformable mirror into a first beam path (L1) and a second beam path (L2), a first deformable sub-mirror (14), which in the first beam path is provided and includes a reflective surface (51) and a drive unit (52) which the refle ktenden surface and the drive unit of the first deformable mirror, a second deformable sub-mirror (15), which is provided in the second beam path and includes a reflective surface (56) and a drive unit (57), the reflective surface and the drive unit of the second deformable mirror, a first detector (8) which detects a light intensity of the light from the first deformable mirror and the first deformable sub-mirror, a second detector (9) which a light intensity of the light from the second deformable mirror and the second deformable sub-mirror and a controller having a first adaptive-optical controller (31) configured to perform a first optimization operation for controlling the drive unit of the first deformable mirror to detect the uneven shape of the reflective surface of the first deformable mirror based on a detected one who update ts from the first detector when the uneven shape of the reflective surface of the first deformable sub-mirror is changed by controlling the drive unit of the first deformable sub-mirror, and a second adaptive-optical controller (32) configured to perform a second optimization process Control the drive unit of the second deformable mirror to update the uneven shape of the reflective surface of the second deformable mirror based on a detected value from the second detector when the uneven shape of the reflective surface of the second deformable sub-mirror by controlling the drive unit of the