Precision vibration isolation system with floor feed forward support

摘要

An apparatus and method for reducing unwanted movement in precision instruments is described. An active vibration isolation system can have a feedback loop that senses the movement of an intermediate mass. In high-noise environments where the feedback loop would otherwise fail or provide insufficient isolation, feed-forward control can be implemented to sense floor vibrations and reduce intermediate mass movement that would otherwise be induced by the floor vibrations. The feed-forward control can limit the movement of the intermediate mass to a level at which the feedback loop is able to work satisfactorily.