Optical arrangement for component inspection of components with a curved surface and inspection procedure for this

摘要

The present invention relates to an optical arrangement with a plurality of optical elements along an optical axis for imaging an object whose surface to be imaged is arranged in the object space of the optical arrangement on an image plane of the optical arrangement, the optical arrangement being designed such that the optical arrangement is a Has image or object field curvature, so that a curved object field of the optical arrangement corresponding to a curved, imaging surface of the object, which extends over a region in the direction of the optical axis of the optical arrangement, lies within the depth of field of the optical arrangement, the optical arrangement distortion of the image causes a curvature of the object surface to be imaged compensated The invention also relates to an inspection system and an inspection method with a corresponding arrangement.