Method and device for correcting imaging errors of an imaging optics

摘要

The invention relates to a method (10) for correcting imaging errors of an imaging optics (40) comprising a plurality of optical elements (42, 44, 46, 48), in which correction surfaces (62, 64, 66) in the beam path of the imaging optics (40) are made of optical Surfaces of the imaging optics (40) are selected which change the wavefront of a wave passing through the imaging optics (40). Furthermore, a field point and directionally resolved wavefront error distribution of the imaging optics (40) is measured (12). Furthermore, correction values are determined by tomographic back-projection of the wavefront error distribution onto the correction surfaces (62, 64, 66) and the respective shape of the correction surfaces (62, 64, 66) is changed on the basis of the correction values (30). Furthermore, the invention relates to a corresponding device for correcting imaging errors.