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GRINDING DEVICE

机译:研磨装置

摘要

A grinding apparatus comprising a chuck table for holding a wafer, a grinding unit having a spindle for rotating a grinding wheel, an inclination adjusting unit for adjusting the inclination of the axis of rotation of the chuck table with respect to the axis of rotation of the spindle, a touch panel and a control section. The control section is configured to compare the information related to the target cross-sectional shape entered in an input field of a target shape with the information related to the current cross-sectional shape input in an input field of a current shape, and then to control the inclination setting unit to adjust the inclination of the Change the axis of rotation of the chuck so that the wafer is ground to obtain the target cross-sectional shape of the wafer.
机译:一种研磨设备,包括:用于保持晶片的卡盘台;具有用于使砂轮旋转的主轴的研磨单元;用于调整卡盘台的旋转轴相对于主轴的旋转轴的倾斜度的倾斜度调整单元。主轴,触摸屏和控制部分。控制部分被配置为将与在目标形状的输入字段中输入的目标横截面形状有关的信息与在当前形状的输入字段中输入的与当前横截面形状有关的信息相比较,然后控制倾斜度设置单元以调整倾斜度。改变卡盘的旋转轴,以便对晶片进行研磨以获得目标晶片的横截面形状。

著录项

  • 公开/公告号DE102020204370A1

    专利类型

  • 公开/公告日2020-10-08

    原文格式PDF

  • 申请/专利权人 DISCO CORPORATION;

    申请/专利号DE202010204370

  • 申请日2020-04-03

  • 分类号B24B7/16;H01L21/304;

  • 国家 DE

  • 入库时间 2022-08-21 11:01:00

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