Silicon particles for preparation of trichlorosilane and its manufacturing method

摘要

The invention relates to a silicon particle, in particular to a particle for preparing trichlorosilane. The particle size ranges from 10 to 500 microns, including: dopants with mass less than 5ppm.· at least one Co catalyst, selected from copper, iron, aluminum and calcium, with a mass of 1-2500 ppm;· metal impurities, free of at least one cocatalyst, mass less than 50 ppm.