Bulk acoustic wave components and methods of plasma dicing the same

摘要

Bulk acoustic wave or BAW component 36 comprises a silicon substrate 22 and bulk acoustic wave resonator or BAWR 24 on the substrate. A hood or cap 21, 23 encloses the BAWR. The cap comprises a sidewall 23 spaced from a substrate edge DE (Figure 2E). The sidewall is 5 microns / micrometres or less, or 1-5 micrometers from the substrate edge. Wireless communication device comprises an antenna and said BAWRs. The BAWRs are in a filter in communication with the antenna. Via 26 may comprise a conductive layer 27 and buffer layer 32 and extends through the substrate. The BAWR may be a film bulk acoustic wave resonator or FBAR, or a solidly mounted resonator or SMR. The wireless communication device may be configured as a mobile phone and may comprise a radio frequency amplifier in communication with the filter and a switch coupled between the filter and antenna.