SPECTROMÈTRE FABRY-PEROT ACCORDABLE FONDÉ SUR UNE TECHNOLOGIE MEMS

摘要

A microelectromechanical (MEMS) spectrometer comprises a substantially transparent upper substrate (28), a substantially transparent lower substrate (20), and an optical detector. The optical detector, which may comprise multiple optical sensors (44, 48), is mounted to capture light transmitted in a single transmission through the upper and lower substantially transparent substrates in a plurality of different wavelengths when a minimum Euclidean distance and a maximum Euclidean distance between the upper and lower substrates differ from one another. A MEMS actuator (30) inclines at least one of the upper and lower substantially transparent substrates in relation to the other for changing at least one of the minimum Euclidean distance and the maximum Euclidean distance. The MEMS actuator may comprise a plurality of pairs of electrodes (42a-42d) defining the voltage therebetween, and the MEMS actuator may perform the inclining by converting a voltage into a mechanical output.