首页>
外国专利>
Performance monitoring of design-based alignment
Performance monitoring of design-based alignment
展开▼
展开▼
页面导航
摘要
著录项
相似文献
摘要
Alignment can be monitored by positioning at least one alignment verification location per alignment frame. The alignment verification location is a coordinate within the alignment frame. A distance between each of the alignment verification locations and a closest instance of an alignment target is determined. An alignment score can be determined based on the distance. The alignment score can include a number of the alignment frames between the alignment verification location and the alignment target. If the alignment score is below a threshold, then alignment setup can be performed.
展开▼