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Neutral atom imaging system

摘要

An imaging system utilizing atomic atoms is provided. The system may include a neutral atom source configured to generate a beam of neutral atoms. The system may also include an ionizer configured to collect neutral atoms scattered from the surface of a sample. The ionizer may also be configured to ionize the collected neutral atoms. The system may also include a selector configured to receive ions from the ionizer and selectively filter received ions. The system may also include one or more optical elements configured to direct selected ions to a detector. The detector may be configured to generate one or more images of the surface of the sample based on the received ions.

著录项

  • 公开/公告号US10714307B2

    专利类型

  • 公开/公告日2020.07.14

    原文格式PDF

  • 申请/专利权人

    申请/专利号US16141150

  • 申请日2018.09.25

  • 分类号

  • 国家 US

  • 入库时间 2022-08-21 10:58:29

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