PROBLEM TO BE SOLVED: To display only defects that a user recognizes as needing to be grasped in a result report. SOLUTION: Based on the difference between the inspection image and the read image, a difference level calculation unit 440 that calculates a difference level indicating the degree of the difference, a difference level calculated by the difference level calculation unit 440, and preset The display determination unit 430 that determines whether or not to display the difference in the result report by comparing the determined reference difference level 436, and the result report regarding the difference is created based on the determination result of the display determination unit 430. And a file creation unit 431. Furthermore, the reference difference level 436 includes at least a first reference value and a second reference value. [Selection diagram] Fig. 5
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