Apparatus for monitoring deposition rate, apparatus for organic layer deposition using the same, method for monitoring deposition rate, and method for manufacturing of organic light emitting display apparatus using the same

摘要

Embodiments of the present invention relates to a deposition rate monitoring device, an organic layer deposition device having the same, a deposition rate monitoring method, and a method of manufacturing an organic light emitting display device using the same, measuring a deposition rate of a deposition material emitted from a deposition source A deposition rate monitoring apparatus for a light source comprising: a light source emitting light having a wavelength within a photoexcitation bandwidth of a deposition material; A first optical system that irradiates light emitted from the light source toward a deposition material emitted from a deposition source; A second optical system that collects light emitted from the deposition material; And a first optical sensor that is emitted from the excited deposition material and detects the amount of light collected in the second optical system.