Aperture synthesis processor, aperture synthesis processing method and program thereof

摘要

Problem to be solved: to provide an aperture synthesis processing apparatus capable of performing an aperture synthesis with high accuracy even if the inspection object has acoustic anisotropy.An aperture synthesis processing device isUltrasonic transmission positionFor each of the combinations that differ between the receiver positions defined for the transmit positionThe acquisition section which is configured to acquire the measurement result including the time series data of the signal value of the ultrasonic wave measured at the receiving position after transmitting the ultrasonic wave to the test object from the transmission position andFor each of the internal positions set inside the test objectAt least for each combinationThe propagation velocity of ultrasonic waves in the propagation path when the ultrasonic wave transmitted from the transmission position is reflected at the internal position and received at the receiving position.A velocity calculation unit constructed to calculate based on the crystal orientation of an object to be inspected andCalculated propagation speedAn aperture synthesis unit is constructed to perform an aperture synthesis process using the acquired time series data and.Diagram