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Interference fringe analysis device, interference fringe analysis method, and distance measurement device

摘要

PROBLEM TO BE SOLVED: To provide an interference fringe analysis technique capable of obtaining an interference fringe frequency with higher accuracy and higher resolution. [Solution] The interference fringe analysis device 12 detects a Fourier transform unit 120 for converting an interference fringe signal into a spectrum in a spatial frequency domain, and a spatial frequency of a peak having a maximum light intensity among peaks included in the spectrum as a reference frequency f

著录项

  • 公开/公告号JP2020101517A

    专利类型发明专利

  • 公开/公告日2020.07.02

    原文格式PDF

  • 申请/专利权人 アズビル株式会社;

    申请/专利号JP2019110093

  • 发明设计人 藤原 久利;古谷 雅;

    申请日2019.06.13

  • 分类号

  • 国家 JP

  • 入库时间 2022-08-21 10:55:15

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