Systems and methods for spin-on coating of periodic organosilicate or self-assembled monolayers on substrates

摘要

To provide a technology to reduce the cost of a chemical substance by controlling the amount of a molecular self-assembly (MSA) chemical substance.SOLUTION: A spin coating processing system includes a spin coating module 104 that receives an MSA chemical substance and spin-coats the MSA chemical substance onto a substrate, and an annealing module 112 that heats the substrate after the spin coating processing. The spin coating processing system may perform pre-processing or pre-wetting processing on the substrate prior to the spin coating processing.SELECTED DRAWING: Figure 1