CIBLE DE SOURCE DE RAYONS X MULTICOUCHE COMPORTANT UNE COUCHE DE SOULAGEMENT DE CONTRAINTE

摘要

An X-ray source target (54) includes a structure configured to generate X-rays when impacted by an electron beam. The structure has an X-ray generating layer (56) comprising X-ray generating material, and a thermally-conductive layer (57) is adjacent to and in thermal communication with the X-ray generating layer. A stress relieving layer (59) is adjacent to the thermally-conductive layer. The thermally-conductive layer is sandwiched between the X-ray generating layer and the stress relieving layer.