VERFAHREN ZUR HERSTELLUNG EINER MULTIFUNKTIONSNANOSCHUTZBESCHICHTUNG MITTELS ZYKLISCHER PULSENTLADUNG MIT GROSSEM TASTVERHÄLTNIS

摘要

A method for cyclically preparing a multi-functional nano protective coating through high duty ratio pulse discharge is provided, which belongs to the field of plasma technologies. This method vacuums a reaction chamber and then sends in an inert gas; makes the substrate to move in the reaction chamber; sends a monomer vapor into the reaction chamber and carries out chemical vapor deposition process, which consists of pretreatment and coating phases. In the pretreatment phase, the plasma discharge mode is high power continuous discharge; in the coating phase, the plasma discharge mode is high duty ratio pulse discharge. The pretreatment and coating phases are cyclically repeated at least once. During the coating process, the introduction of this cycle is conducive to generating more active sites on the substrate, improving the effective coating, and resulting in a more compact coating structure. A nano coating with a multiple layer composite structure is obtained, which provides multiple layers of protection for the product itself. There is a more compact coating structure microscopically, while on the macro level, it shows excellent hydrophobic property, adhesive force, acid and alkali resistance, mechanical property, and dampness and heat resistance performance.