DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES, AGENCEMENT À OUVERTURES MULTIPLES INTERCHANGEABLE POUR UN DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES ET PROCÉDÉ DE FONCTIONNEMENT D'UN DISPOSITIF À FAISCEAU DE PARTICULES CHARGÉES

摘要

A charged particle beam device, comprising a charged particle source configured to emit a charged particle beam; a movable stage (320) comprising an assembly of aperture arrays (122, 126) having at least a first aperture array and a second aperture array, the movable stage is configured to align the assembly of aperture arrays with the charged particle beam, and at least one aperture array comprises a shielding tube (350) coupled to the movable stage.