GYROSCOPES VIBRATOIRES DE CORIOLIS MULTI-MODE AU SILICIUM POSSÉDANT UNE STRUCTURE MÉCANIQUE SYMÉTRIQUE EN ROTATION D'ORDRE ÉLEVÉ ET 32 ÉLECTRODES

摘要

An angular sensor, comprising a Coriolis vibratory gyroscope (CVG) resonator, capable of oscillating along a first pair of normal n=1 modes comprising a first normal mode and a second normal mode; and a second pair of normal n=2 modes comprising a third normal mode and a fourth normal mode; the sensor further comprising one drive electrode and one sense electrode aligned along an anti-nodal axis of each mode; and a pair of bias tune electrodes aligned with an anti-nodal axis of each mode if no drive and sense electrode pair is aligned with said anti-nodal axis.