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PROCÉDÉ DE PRODUCTION D'UNE COUCHE DE MATÉRIAU DUR SUR UN SUBSTRAT, COUCHE DE MATÉRIAU DUR ET OUTIL D'USINAGE PAR ENLÈVEMENT DE COPEAUX
PROCÉDÉ DE PRODUCTION D'UNE COUCHE DE MATÉRIAU DUR SUR UN SUBSTRAT, COUCHE DE MATÉRIAU DUR ET OUTIL D'USINAGE PAR ENLÈVEMENT DE COPEAUX
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摘要
A process for producing a hard material layer on a substrate includes depositing a TiCNB hard material layer by chemical vapor deposition (CVD) from a gas system including a titanium source, a boron source, at least one nitrogen source and at least one carbon source, in which the carbon source includes an alkane having at least two carbon atoms, an alkene or an alkyne. A cutting tool includes a substrate to which a TiCNB hard material layer has been applied, in which a ratio of carbon atoms (C) to nitrogen atoms (N) in the TiCxNyB1-x-y system deposited on the substrate is 0.70≦X≦1.0, preferably 0.75≦X≦0.85, and a polished section through the substrate and the hard material layer is substantially free of an eta phase following Murakami etching.
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