PUCE DE DÉTECTEUR PHOTONIQUE, DISPOSITIF DE CAPTEUR PHOTONIQUE EMBALLÉ ET AGENCEMENT

摘要

The invention relates to a photonic sensor chip (100) comprising a semiconductor substrate (112) with a cavity (118) extending from a back side (116) through an entire depth of the semiconductor substrate (112), a photonic plane (124) located on the front side (114) of the semiconductor substrate (112). The photonic sensor chip (100) includes a photonic particle sensor element (120) with an active-surface element (122) having an exposed active surface facing towards the back side (116) of the semiconductor substrate (112), for capturing selected particles from at least one fluid or gas to which the active surface is exposable. The cavity (118) provides access to the active surface from the back side (116). The photonic particle sensor element (120) receives an optical input wave via the photonic plane (124), to expose captured particles on the active-surface element (120) to interaction with the optical input wave and to provide a resulting optical output wave having a spectral component indicative of the interaction between the optical input wave and captured particles.