ÉTANCHÉITÉ AU VIDE, ÉTANCHÉITÉ DOUBLE, SYSTÈME À VIDE ET POMPE À VIDE

摘要

PROBLEM TO BE SOLVED: To provide an improved vacuum seal enabling reliable sealing even in a case of extremely low vacuum pressure, especially even in a case of pressure of less than 10mba.SOLUTION: A vacuum seal is configured to seal a connection part between two seal surfaces, especially between flanges, more especially between an outlet flange of a recipient and an inlet flange of a vacuum pump, especially a turbo-molecular pump. The vacuum seal includes a ring-shaped metal body. In the metal body, a shell composed of a non-metal material is arranged.SELECTED DRAWING: Figure 8