LASERPYROLYSE-SYNTHESE VON SILIZIUM-NANOKRISTALLEN

摘要

The invention relates to the synthesis of silicon-containing nanoparticles by laser pyrolysis. For this purpose: a precursor (SiH4) containing the element silicon is conveyed, by a transport fluid (He), into a pyrolysis reactor (REAC); laser radiation (LAS) is applied, in the reactor, to a mixture that the transport fluid and the precursor form; and silicon-containing nanoparticles (nP) are recovered at the exit of the reactor. In particular, the power of the laser radiation is controlled. Furthermore, the effective pulse duration is controlled within a laser firing period. Typically, for a power greater than 500 watts and a pulse duration greater than 40% of a laser firing period, nanoparticles having a crystalline structure with a size of less than or of the order of one nanometer are obtained at a rate greater than or of the order of 80 milligrams per hour. Under optimum conditions, a record rate of greater than 740 milligrams per hour was able to be obtained.