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RÉSEAU DE PHOTODIODES SUR SUBSTRAT FLEXIBLE POUR LA TOMOGRAPHIE
RÉSEAU DE PHOTODIODES SUR SUBSTRAT FLEXIBLE POUR LA TOMOGRAPHIE
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摘要
A sensor array module (100) for sensing radiation is provided, comprising a flexible substrate (102) including a surface (112), a plurality of sensing elements (103) directly provided on a sensing area (104) of the surface of the flexible substrate, a plurality of conductive paths (113) comprised on the substrate, each conductive path (113) providing a direct electric connection between each sensing element (103) and one zone (126) of the substrate adapted for connecting one input of a readout unit (106). Further, a detector tile and a detector comprising such sensor array module is provided, as well as a method of manufacture.
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