PROCÉDÉ DE CARACTÉRISATION ET DE COMMANDE BASÉ SUR LA SECONDE HARMONIQUE, AMÉLIORANT LE FACTEUR DE QUALITÉ ET RÉDUISANT LE COURANT DE TRAVERSÉE DANS DES RÉSONATEURS MEMS ÉLECTROSTATIQUES À ENTREFER VARIABLE

摘要

A method of an open loop characterization of an electrostatic MEMS based resonator with a varying gap, the method including: converting, via a trans-impedance amplifier circuit, an output current signal of the resonator into a voltage; multiplying the output current signal converted into the voltage, by means of a multiplier circuit, with an AC signal or with a different signal at a frequency of the resonator and carrying a second harmonic signal to a main tone; and measuring a frequency response of a signal cleared of frequencies apart from the main tone using a network analyzer.