SYSTÈME, CHAMBRE DE TEST, ET PROCÉDÉ DE MESURE DU TEMPS DE RÉPONSE D'UN CAPTEUR DE PRESSION

摘要

A test chamber is used within a system for testing microelectromechanical systems (MEMS) pressure sensors. The system includes a processor, two air tanks pressurized to different air pressures, a high speed switch mechanism, and the test chamber. The test chamber houses a MEMS pressure sensor to be tested, a control pressure sensor, and a temperature sensor. The MEMS pressure sensor and the control pressure sensor are located in a cavity within the test chamber. The cavity is of minimal size and has a domed inner surface. A response time of the MEMS pressure sensor within the cavity can be characterized by utilizing the system and subjecting the MEMS pressure sensor to a pressure stimulus pulse produced by switching between the two air tanks.