CAPTEUR D'ANGLE MAGNÉTORESISTIF À CHAMP MAGNÉTIQUE DE HAUTE INTENSITÉ ET À BOÎTIER UNIQUE

摘要

A single-package high-field magnetoresistive angle sensor (73, 74), comprising at least one push-pull magnetoresistive bridge and soft magnetic flux attenuators (17, 29, 68, 70) located on the push-pull magnetoresistive bridge. The push-pull magnetoresistive bridge comprises a plurality of magnetoresistive sensor units (16, 20-23, 28, 67, 69, 7310, 7310', 7311, 7311'). The magnetoresistive sensor units (16, 20-23, 28, 67, 69, 7310, 7310', 7311, 7311') are of an MTJ or GMR type. Each magnetoresistive sensor unit (16, 20-23, 28, 67, 69, 7310, 7310', 7311, 7311') comprises at least one pinned layer (76, 83, 95-98), one ferromagnetic reference layer (79, 88), a nonmagnetic spacer layer (80, 89), and a ferromagnetic free layer (81, 90). The ferromagnetic free layer (81, 90) is a low aspect ratio oval or circle, which can make the intensity of magnetization of the ferromagnetic free layer (81, 90) align along an external magnetic field in any direction. The soft magnetic flux attenuator (17, 29, 68, 70) covers the surface of all the magnetoresistive sensor units (16, 20-23, 28, 67, 69, 7310, 7310', 7311, 7311') to attenuate the high intensity external magnetic field to be within a measurable range of the magnetoresistive sensor units (16, 20-23, 28, 67, 69, 7310, 7310', 7311, 7311'); the push-pull magnetoresistive bridge has antiparallel or mutually-orthogonal magnetization directions of the reference layer. The magnetoresistive angle sensor can measure the rotation angle of a high-intensity magnetic field. It has the advantages of low power consumption and small size.