Compressor with a metal diaphragm bellows and operating method for such a compressor

摘要

The invention relates to a compressor (1) having at least one metal diaphragm bellows (16), forming a positive displacement chamber, for compressing and/or for conveying gases, comprising a housing in which a drive and the metal diaphragm bellows (16), and a coupling element that connects the drive and the metal diaphragm bellows (16), are arranged, an internal volume of the housing being hermetically sealed against the surroundings of the compressor (1). The compressor (1) is characterised in that an internal pressure (p