VERFAHREN ZUR HERSTELLUNG EINES ELEKTRONISCHEN BAUTEILS MIT MEHREREN QUANTUM DOTS, SOWIE RESULTIERENDES ELEKTRONISCHES BAUTEIL

摘要

The invention relates to a method for manufacturing an electronic component (1) with multiple quantum islands, comprising the steps of: -provision of a stack including a substrate (100), a nanostructure (110) made of semiconductor material superimposed on the substrate (100), comprising first and second quantum islands (111, 112) and a link (115) connecting these first and second quantum islands, first and second control grid stacks (143, 144) arranged on said first and second quantum islands (111, 112), said grid stacks (143, 144) being separated by a groove (15), the quantum islands and said link (115) having the same thickness; partial thinning of said link (115) using the grid stacks (143, 144) as masks, so as to obtain a bond having a thickness less than that of the quantum islands; forming a dielectric layer (119) on said thinned bond (115 ).